JPH0450801U - - Google Patents

Info

Publication number
JPH0450801U
JPH0450801U JP9269290U JP9269290U JPH0450801U JP H0450801 U JPH0450801 U JP H0450801U JP 9269290 U JP9269290 U JP 9269290U JP 9269290 U JP9269290 U JP 9269290U JP H0450801 U JPH0450801 U JP H0450801U
Authority
JP
Japan
Prior art keywords
beams
substrate
substrate holder
interference exposure
beam interference
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9269290U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9269290U priority Critical patent/JPH0450801U/ja
Publication of JPH0450801U publication Critical patent/JPH0450801U/ja
Pending legal-status Critical Current

Links

JP9269290U 1990-09-05 1990-09-05 Pending JPH0450801U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9269290U JPH0450801U (en]) 1990-09-05 1990-09-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9269290U JPH0450801U (en]) 1990-09-05 1990-09-05

Publications (1)

Publication Number Publication Date
JPH0450801U true JPH0450801U (en]) 1992-04-28

Family

ID=31829352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9269290U Pending JPH0450801U (en]) 1990-09-05 1990-09-05

Country Status (1)

Country Link
JP (1) JPH0450801U (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169021A (ja) * 1984-09-12 1986-04-09 Sharp Corp 光学装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6169021A (ja) * 1984-09-12 1986-04-09 Sharp Corp 光学装置

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